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es240
The ES-240 is a high resolution, automatic inspection system for semiconductor wafers, reticles, flat panel displays, and glass filters.
epd1020
The EI-100 is a high speed, in-line automatic inspection system for industrial parts, such as glass lenses, used in automotive lamps.
ei100
The PDS-1020 system is a high throughput automatic inspection system for reticles with or without pellicles.  System simultaneously inspects both sides of the reticle.
 
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