The Eutecnics Model PDS-1020 is a small footprint automatic reticle inspection system. Simultaneous inspection of the back glass side and the front pellicle side of a reticle is performed in less than three minutes. The system can be operated as a stand-alone unit controlled by a laptop or host computer, or it can be integrated with a robotic gripper and operated as part of an automatic stocker-inspection station.
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